@article{article, title = {{The effect of ion-beam specimen preparation techniques on vacancy-type defects in silicon}}, publisher = {{Elsevier BV}}, url = {{}}, year = {{2006}}, month = {{1}}, author = {{Gandy AS and Donnelly SE and Beaufort M-F and Vishnyakov VM and Barbot J-F}}, doi = {{10.1016/j.nimb.2005.08.097}}, volume = {{242}}, journal = {{Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}}, issue = {{1-2}}, pages = {{610-613}}, note = {{Accessed on 2025/05/23}}}