@inproceedings{inproceedings, title = {{The dependence of the growth rate of LPCVD grown SiGe quantum wells on the Ge composition and the layer thickness}}, publisher = {{The Committee of European Societies of Microscopy}}, url = {{}}, year = {{-0001}}, month = {{11}}, author = {{Walther T and Boothroyd CB and Humphreys CJ}}, volume = {{1}}, pages = {{317-318}}, note = {{Accessed on 2025/05/23}}}