TY - CONF T1 - Calibration of thickness-dependent k-factors of Germanium X-ray lines for improved analytical transmission electron microscopy of SiGe layers CY - Oxford PY - 2012/09/01 AU - Qiu Y AU - Norris DJ AU - Walther T ED - Stokes DJ ED - Hutchison JL PB - Royal Microscopical Society SN - 978-0-9502463-6-9 VL - 2 IS - Physical Sciences: Tools and Techniques SP - 643 EP - 644 Y2 - 2025/05/29 ER -