TY - JOUR T1 - An interpretable machine learning based approach for process to areal surface metrology informatics JO - Surface Topography: Metrology and Properties UR - https://eprints.whiterose.ac.uk/179062/ PY - 2021/12/01 AU - Obajemu O AU - Mahfouf M AU - Papananias M AU - McLeay TE AU - Kadirkamanathan V ED - DO - DOI: 10.1088/2051-672x/ac28a7 PB - IOP Publishing VL - 9 IS - 4 Y2 - 2025/05/24 ER -