@article{article, title = {{Controlled-width track in through silicon via using 3D holographic photolithography with modified electrodepositable photoresist}}, url = {{}}, year = {{2010}}, month = {{1}}, author = {{Toriz-Garcia JJ and Williams GL and McWilliam R and Curry R and Seed NL and Purvis A and Ivey PA}}, doi = {{10.1088/0960-1317/20/1/015012}}, volume = {{20}}, journal = {{J MICROMECH MICROENG}}, issue = {{1}}, note = {{Accessed on 2025/05/21}}}