@article{article, title = {{Where physics meets chemistry: Thin film deposition from reactive plasmas}}, publisher = {{Springer Science and Business Media LLC}}, url = {{http://dx.doi.org/10.1007/s11705-016-1598-7 }}, year = {{2016}}, month = {{12}}, author = {{Michelmore A and Whittle JD and Bradley JW and Short RD}}, doi = {{10.1007/s11705-016-1598-7}}, volume = {{10}}, journal = {{Frontiers of Chemical Science and Engineering}}, issue = {{4}}, pages = {{441-458}}, note = {{Accessed on 2025/07/15}}}