TY - JOUR T1 - XTEM characterization of modulated ion implantation through self-organized anodic aluminum oxide (AAO) membranes JO - Materials Research Society Symposium Proceedings PY - 2011/01/01 AU - Guan W AU - Ghatak J AU - Peng N AU - Peng Y AU - Jeynes C AU - M枚bus G ED - DO - DOI: 10.1557/opl.2012.757 VL - 1411 SP - 49 EP - 54 Y2 - 2025/05/27 ER -